Semiconductor device

ABSTRACT

A semiconductor device includes a substrate having an active pattern therein, a gate electrode extending across the active pattern and a source/drain region on the active pattern laterally adjacent the gate electrode. The device further includes a contact structure including a first contact on the source/drain region, a second contact on the first contact and a spacer on sidewalls of the first and second contacts.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority under 35 U.S.C. § 119 to Korean PatentApplication No. 10-2018-0072891, filed on Jun. 25, 2018, in the KoreanIntellectual Property Office, the disclosure of which is herebyincorporated by reference in its entirety.

TECHNICAL FIELD

Example embodiments of the present disclosure relate to a semiconductordevice and more specifically, to a semiconductor device including afield effect transistor and a method of manufacturing the same.

BACKGROUND

Small sized, multi-functional and/or low cost semiconductor devices areused in electronic devices. Semiconductor devices are classified intosemiconductor memory devices storing logical data, semiconductor logicdevices processing logical data, and hybrid semiconductor devicesincluding memory elements and logic elements. With development of anelectronics industry, there is an increasing demand for characteristics,e.g., high speed, high reliability, and/or multi-function, ofsemiconductor devices. To meet the demand, structures of semiconductordevices have been complicated, and semiconductor devices have becomemore highly integrated.

SUMMARY

According to example embodiments of the inventive concepts, asemiconductor device includes a substrate having an active patterntherein, a gate electrode extending across the active pattern, and asource/drain region on the active pattern laterally adjacent the gateelectrode. The device further includes a contact structure including afirst contact on the source/drain region, a second contact on the firstcontact and a spacer on sidewalls of the first and second contacts andhaving an upper surface coplanar with an upper surface of the secondcontact.

According to further example embodiments of the inventive concepts, asemiconductor device includes a substrate having an active patterntherein, a gate electrode extending across the active pattern, asource/drain region on the active pattern laterally adjacent the gateelectrode, and a gate contact electrically connected to the gateelectrode. The device further includes a contact structure electricallyconnected to the source/drain region and including a first contact onthe source/drain region and a second contact on the first contact,wherein an upper surface of the second contact is coplanar with an uppersurface of the gate contact and wherein an upper surface of the firstcontact is lower than a lower surface of the gate contact.

According to still further example embodiments of the inventiveconcepts, a semiconductor device includes a substrate having an activepattern therein, a gate electrode longitudinally extending across theactive pattern along a first direction, and a source/drain region on theactive pattern laterally adjacent the gate electrode. The device furtherincludes a contact structure including a first contact on thesource/drain region, a second contact on the first contact and having amaximum width less than a maximum width of the first contact along thefirst direction. An insulation layer is disposed on a sidewall of thefirst contact.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view illustrating a semiconductor device according toexample embodiments.

FIGS. 2A, 2B, and 2C are cross-sectional views taken along lines A-A′,B-B′, and C-C′, respectively, of FIG. 1.

FIGS. 3, 5, 7, 9, 11 and 13 are plan views illustrating a method ofmanufacturing a semiconductor device according to example embodiments.

FIGS. 4. 6A, 8A, 10A, 12A, and 14A are cross-sectional views taken alongline A-A′ of FIGS. 3, 5, 7, 9, 11, and 13, respectively.

FIGS. 6B, 8B, 10B, 12B, and 14B are cross-sectional views taken alongline B-B′ of FIGS. 5, 7, 9, 11, and 13, respectively.

FIGS. 6C, 8C, 10C, 12C, and 14C are cross-sectional views taken alongline C-C′ of FIGS. 5, 7, 9, 11, and 13, respectively.

FIGS. 15 to 20 illustrate contact structures according to exampleembodiments and are cross-sectional views of portion M of FIG. 2A and ofportion N of FIG. 2B.

DETAILED DESCRIPTION

Various example embodiments will now be described more fully hereinafterwith reference to the accompanying drawings. Like reference numerals mayrefer to like elements throughout this application.

FIG. 1 is a plan view illustrating a semiconductor device according toexample embodiments. FIGS. 2A, 2B, and 2C are cross-sectional viewstaken along lines A-A′, B-B′, and C-C′, respectively, of FIG. 1.

FIGS. 1 and 2A to 2C, a substrate 100 may include a PMOSFET region PRand an NMOSFET region NR. The substrate 100 may be a semiconductorsubstrate including silicon, germanium, or etc. or a compoundsemiconductor substrate. As an example, the substrate 100 may be asilicon substrate.

In some embodiments, the PMOFET region PR and the NMOSFET region NR maybe a logic cell region in which logic transistors constituting logiccircuits of a semiconductor device are disposed. For example, the logictransistors constituting a process core or an input/output (I/O)terminal may be disposed on the substrate 100 of the logic cell region.The PMOSFET region PR and the NMOSFET region NR may include some of thelogic transistors.

The PMOSFET region PR and the NMOSFET region NR may be defined by asecond trench TR2 formed in an upper portion of the substrate 100. Thesecond trench TR2 may be disposed between the PMOSFET region PR and theNMOSFET region NR. The PMOSFET region PR and the NMOSFET region NR maybe spaced apart from each other in a first direction D1 with the secondtrench TR2 therebetween. Each of the PMOSFET region PR and the NMOSFETregion NR may extend in a second direction D2 crossing the firstdirection D1. The first direction D1 and the second direction D2 may beparallel to an upper surface of the substrate 100.

A plurality of active patterns AP1 and AP2 may be disposed on thePMOSFET region PR and the NMOSFET region NR and may extend in the seconddirection D2. The active patterns AP1 and AP2 may include first activepatterns AP1 on the PMOSFET region PR and second active patterns AP2 onthe NMOSFET region NR. The first and second active patterns AP1 and AP2may be portions, e.g., vertically protruding portions, of the substrate100. A first trench TR1 may be defined between adjacent first activepatterns AP1 and between adjacent second active patterns AP2.

A device isolation layer ST may fill the first and second trenches TR1and TR2. The device isolation layer ST may include an insulatingmaterial, e.g., silicon oxide. Upper portions of the first and secondactive patterns AP1 and AP2 may vertically protrude above the deviceisolation layer ST. Each of the upper portions of the first and secondactive patterns AP1 and AP2 may have a fin shape. The device isolationlayer ST may not cover the upper portions of the first and second activepatterns AP1 and AP2. The device isolation layer ST may cover lowersidewalls of the first and second active patterns AP1 and AP2.

First source/drain regions SD1 may be disposed on the first activepatterns AP1. Each of the first source/drain regions SD1 may include afirst conductivity type (e.g., a p-type) impurity region. A firstchannel region CH1 may be interposed between a pair of firstsource/drain regions SD1. Second source/drain regions SD2 may bedisposed on the second active patterns AP2. Each of the secondsource/drain regions SD2 may include a second conductivity type (e.g.,an n-type) impurity region. A second channel region CH2 may beinterposed between a pair of second source/drain regions SD2.

The first and second source/drain regions SD1 and SD2 may be epitaxialpatterns formed by a selective epitaxial growth process. Upper surfacesof the first and second source/drain regions SD1 and SD2 may bepositioned at a higher level than upper surfaces of the first and secondchannel regions CH1 and CH2. In some embodiments, the first source/drainregions SD1 may include a semiconductor element (e.g., SiGe) having alarger lattice constant than that of a semiconductor element of thesubstrate 100. Thus, the first source/drain regions SD1 may apply acompressive stress to the first channel region CH1. In some embodiments,the second source/drain regions SD2 may include the same element (e.g.,Si) as the substrate 100.

Gate electrodes GE may be disposed to traverse the first and secondactive patterns AP1 and AP2 and may extend in the first direction D1.The gate electrodes GE may be spaced apart from each other. The gateelectrodes GE may vertically overlap the first and second channelregions CH1 and CH2. Referring to FIG. 2C, each of the gate electrodesGE may cover the upper surface and sidewalls of each of the first andsecond channel regions CH1 and CH2. The gate electrodes GE may include aconductive metal nitride, e.g., titanium nitride or tantalum nitride,and/or metal, e.g., titanium, tantalum, tungsten, copper, or aluminum.

A pair of gate spacers GS may be disposed on opposite sidewalls of eachof the gate electrodes GE. The gate spacers GS may extend in the firstdirection D1 along the gate electrodes GE. Upper surfaces of the gatespacers GS may be higher than upper surfaces of the gate electrodes GE,with respect to the upper surface of the substrate 100. The uppersurfaces of the gate spacers GS may be coplanar with an upper surface ofa first interlayer insulation layer 110 to be described later. The gatespacers GS may include at least one of SiCN, SiCON, and SiN. In someembodiments, each of the gate spacers GS may include a multi-layer filmformed of at least two of SiCN, SiCON, and SiN

Gate dielectric patterns GI may be interposed between the gateelectrodes GE and the first and second active patterns AP1 and AP2. Eachof the gate dielectric patterns GI may extend along a lower surface ofeach of the gate electrodes GE. Each of the gate dielectric patterns GImay cover the upper surface and the sidewalls of each of the first andsecond channel regions CH1 and CH2. The gate dielectric patterns GI mayinclude a high-k dielectric material. For example, the high-k dielectricmaterial may include at least one of hafnium oxide, hafnium siliconoxide, lanthanum oxide, zirconium oxide, zirconium silicon oxide,tantalum oxide, titanium oxide, barium strontium titanium oxide, bariumtitanium oxide, strontium titanium oxide, lithium oxide, aluminum oxide,lead scandium tantalum oxide, and lead zinc niobate.

Gate capping patterns GP may be disposed on the gate electrodes GE,respectively. The gate capping patterns GP may extend in the firstdirection D1 along the gate electrodes GE. The gate capping patterns GPmay include a material having an etch selectivity with respect to thefirst interlayer insulation layer 110 and a second interlayer insulationlayer 120 to be described later. The gate capping patterns GP mayinclude at least one of SiON, SiCN, SiCON, and SiN.

The first interlayer insulation layer 110 may be disposed on thesubstrate 100. The first interlayer insulation layer 110 may cover thegate spacers GS and the first and second source/drain regions SD1 andSD2. The upper surface of the first interlayer insulation layer 110 maybe substantially coplanar with upper surfaces of the gate cappingpatterns GP. The second interlayer insulation layer 120 may be disposedon the first interlayer insulation layer 110 to cover the gate cappingpatterns GP. The first and second interlayer insulation layers 110 and120 may include, e.g., silicon oxide.

Contact structures AC may be disposed to pass through the first andsecond interlayer insulation layers 110 and 120 and to be electricallyconnected to the first and second source/drain regions SD1 and SD2.Specifically, a contact hole CNH may be defined to pass through thefirst and second interlayer insulation layers 110 and 120 to expose thefirst source/drain region SD1 and/or the second source/drain region SD2.Each of the contact structures AC may be disposed in the contact holeCNH. Each of the contact structures AC may be disposed between a pair ofgate electrodes GE.

Each of the contact structures AC may include a first contact CT1, asecond contact CT2 on the first contact CT1, a contact spacer CSP, andan insulation layer MIL. The contact spacer CSP may conformally cover aninner sidewall of the contact hole CNH.

The first contact CT1 may be disposed in a lower portion of the contacthole CNH. The first contact CT1 may include a first barrier pattern BM1and a first conductive pattern FM1. The first barrier pattern BM1 may beinterposed between the first conductive pattern FM1 and the contactspacer CSP and between the first conductive pattern FM1 and each of thefirst and second source/drain regions SD1 and SD2. The first barrierpattern BM1 may cover sidewalls and a lower surface of the firstconductive pattern FM1. The first barrier pattern BM1 may not cover anupper surface of the first conductive pattern FM1. As an example, anupper surface of the first barrier pattern BM1 may be coplanar with theupper surface of the first conductive pattern FM1. An upper surface ofthe first contact CT1 may be lower than the upper surface of each of thegate electrodes GE, with respect to the upper surface of the substrate100.

The second contact CT2 and the insulation layer MIL may be disposed inan upper portion of the contact hole CNH. The insulation layer MIL maybe interposed between the second contact CT2 and the contact spacer CSP.The second contact ST2 may contact the upper surface of the firstcontact CT1. A lower surface of the second contact CT2 may be lower thanthe upper surface of each of the gate electrodes GE, with respect to theupper surface of the substrate 100. An upper surface of the secondcontact ST2 may be coplanar with an upper surface of the contact spacerCSP, an upper surface of the insulation layer MIL, and an upper surfaceof the second interlayer insulation layer 120.

The first barrier pattern BM1 may include metal nitride, e.g., at leastone of titanium nitride, tungsten nitride, and tantalum nitride. Thefirst conductive pattern FM1 may include metal, e.g., at least one ofaluminum, copper, tungsten, molybdenum, and cobalt. The second contactCT2 may include metal, e.g., at least one of aluminum, copper, tungsten,molybdenum, and cobalt. As an example, the second contact CT2 mayinclude metal different from the first conductive pattern FM1. The firstconductive pattern FM1 may include tungsten, and the second contact CT2may include cobalt. The contact spacer CSP may include at least one ofSiCN, SiCON, and SiN. The insulation layer MIL may include silicon oxideor silicon nitride.

Referring again to FIG. 2B, a maximum width of the first contact CT1 inthe first direction D1 may be a first width W1, and a maximum width ofthe second contact CT2 in the first direction D1 may be a second widthW2. The first width W1 may be greater than the second width W2. A widthof an upper portion of the first contact CT1 in the second direction D2may also be greater than a width of a lower portion of the secondcontact CT2 in the second direction D2, as shown in FIG. 2A.

The first contact CT1 may include a first portion P1 and a secondportion P2 that are adjacent to each other in the first direction D1.For example, the first portion P1 may be disposed on one of a pair offirst active patterns AP1, and the second portion P2 may be disposed onthe other one of the pair of first active patterns AP1. The secondcontact CT2 may be disposed on the first portion P1 or the secondportion P2. Since the first width W1 is greater than the second width W2as described above, the second contact CT2 may be disposed on any of thefirst portion P1 and the second portion P2.

Referring again to FIGS. 1 and 2A to 2C, a silicide layer may beinterposed between each of the first and second source/drain regions SD1and SD2 and the first contact CT1. The contact structure AC may beelectrically connected to the first source/drain region SD1 and thesecond source/drain regions SD2. The silicide layer may include metalsilicide, e.g., at least one of titanium-silicide, tantalum-silicide,tungsten-silicide, nickel-silicide, and cobalt-silicide.

Gate contacts GC may be disposed to pass through the second interlayerinsulation layer 120 and the gate capping patterns GP to be electricallyconnected to the gate electrodes GE. Each of the gate contacts GC mayinclude a second barrier pattern BM2, a second conductive pattern FM2,and the contact spacer CSP. The second barrier pattern BM2 may beinterposed between the second conductive pattern FM2 and the contactspacer CSP and between the second conductive pattern FM2 and each of thegate electrodes GE. The second barrier pattern BM2 may cover sidewallsand a lower surface of the second conductive pattern FM2. The secondbarrier pattern BM2 may not cover an upper surface of the secondconductive pattern FM2.

The second barrier pattern BM2 may include metal nitride. The secondconductive pattern FM2 may include metal. The contact spacer CSP of eachof the gate contacts GC may include the same material as the contactspacer CSP of each of the contact structures AC.

Each of the gate contacts GC may contact the upper surface of each ofthe gate electrodes GE. A lower surface of each of the gate contacts GCmay be higher than the upper surface of the first contact CT1 of each ofthe contact structures AC, with respect to the upper surface of thesubstrate 100. The lower surface of each of the gate contacts GC may behigher than the lower surface of the second contact CT2 of each of thecontact structures AC, with respect to the upper surface of thesubstrate 100. Upper surfaces of the gate contacts GC may be coplanarwith the upper surface of the second interlayer insulation layer 120.

As an example embodiment, at least one gate contact GC may be disposedon each of the first active patterns AP1 or each of the second activepatterns AP2. The gate contact GC may be adjacent to the contactstructure AC in the second direction D2. Hereinafter, a relationshipbetween the gate contact GC and the contact structure AC adjacentthereto will be described in detail.

As an example, the first portion P1 of the first contact CT1 of thecontact structure AC may be adjacent to the gate contact GC in thesecond direction D2. The second contact CT2 of the contact structure ACmay be disposed on the second portion P2 of the first contact CT1. Inother words, the second contact CT2 of the contact structure AC may beoffset from the gate contact GC.

In plan view, the second contact CT2 of the contact structure AC may bespaced a minimum distance ML apart from the gate contact GC.Accordingly, an electrical short between the gate contact GC and thesecond contact CT2 of the contact structure AC may be prevented. If thesecond contact CT2 of the contact structure AC is disposed on the firstportion of the first contact CT1, the gate contact GC and the secondcontact CT2 may be very close to each other, such that the electricalshort may be generated.

In addition, as described above, the lower surface of the gate contactGC may be higher than the upper surface of the first contact CT1 of thecontact structure AC, with respect to the upper surface of the substrate100. Thus, the electrical short between the gate contact AC and thefirst contact CT1 of the contact structure AC may be prevented.

A third interlayer insulation layer 130 may be disposed on the secondinterlayer insulation layer 120. Wiring lines M1 and vias V1 may bedisposed in the third interlayer insulation layer 130. Each of the viasV1 may be interposed between each of the wiring lines M1 and each of thecontact structures AC and between each of the wiring lines M1 and eachof the gate contacts GC and may vertically connect them. The wiringlines M1 and the vias V1 may include metal, e.g., aluminum, copper,tungsten, molybdenum, and cobalt.

According to example embodiments, since the gate contacts GC aredisposed in the PMOSFET region PR and the NMOSFET region NR, a distancebetween the PMOSFET region PR and the NMOSFET region NR may be reduced.As a length of the logic cell in the first direction D1 is reduced, anintegration density of the semiconductor device may be increased.

The contact structure AC adjacent to the gate contact GC may include adouble contact structure including the first contact CT1 and the secondcontact CT2. The first contact CT1 may be positioned at a lower levelthan the gate contact GC, with respect to the upper surface of thesubstrate 100. The second contact CT2 may be positioned at substantiallythe same level as the gate contact GC. The second contact CT2 may beoffset from the gate contact GC, such that the minimum distance betweenthe second contact CT2 and the gate contact GC may be secured.Therefore, the electrical short between the gate contact GC and thecontact structure AC may be prevented, thus enhancing the reliability ofthe semiconductor device.

FIGS. 3, 5, 7, 9, 11 and 13 are plan views illustrating a method ofmanufacturing a semiconductor device according to example embodiments.FIGS. 4. 6A, 8A, 10A, 12A, and 14A are cross-sectional views taken alongline A-A′ of FIGS. 3, 5, 7, 9, 11, and 13, respectively. FIGS. 6B, 8B,10B, 12B, and 14B are cross-sectional views taken along line B-B′ ofFIGS. 5, 7, 9, 11, and 13, respectively. FIGS. 6C, 8C, 10C, 12C, and 14Care cross-sectional views taken along line C-C′ of FIGS. 5, 7, 9, 11,and 13, respectively.

Referring to FIGS. 3 and 4, an upper portion of the substrate 100 may bepatterned to form the first and second active patterns AP1 and AP2. Thefirst trench TR1 may be formed between the first active patterns AP1 andbetween the second active patterns AP2. The second trench TR2 may beformed between the PMOSFET region PR in which the first active patternsAP1 are formed and the NMOSFET region NR in which the second activepatterns AP2 are formed.

The device isolation layer ST may be formed on the substrate 100 to fillthe first and second trenches TR1 and TR2. The device isolation layer STmay include an insulation material, e.g., silicon oxide. The deviceisolation layer ST may be recessed until upper portions of the first andsecond active patterns AP1 and AP2 are exposed, such that the upperportions of the first and second active patterns AP1 and AP2 mayvertically protrude above the device isolation layer ST.

Referring to FIGS. 5 and 6A to 6C, sacrificial patterns PP may be formedon the substrate 100 to traverse the first and second active patternsAP1 and AP2. The sacrificial patterns PP may be formed in a linear orbar shape extending in the first direction D1. Specifically, theformation of the sacrificial patterns PP may include forming asacrificial layer on a whole surface of the substrate 100, forming hardmask patterns MA on the sacrificial layer, and patterning thesacrificial layer using the hard mask patterns MA as an etch mask. Thesacrificial layer may include a polysilicon layer.

A pair of gate spacers GS may be formed on opposite sidewalls of each ofthe sacrificial patterns PP. The gate spacers GS may be formed onopposite sidewalls of each of the first and second active patterns AP1and AP2. The sidewalls of the first and second active patterns APcovered by the gate spacers GS may be surfaces that are not covered bythe device isolation layer ST and the sacrificial patterns PP.

The formation of the gate spacers GS may include conformally forming agate spacer layer on the whole surface of the substrate 100 andanisotropically etching the gate spacer layer. The gate spacer layer mayinclude ate least one of SiCN, SiCON, and SiN. In some embodiments, thegate spacer layer may be a multi-layer film including at least two ofSiCN, SiCON, and SiN.

Referring to FIGS. 7 and 9A to 9C, the first source/drain regions SD1may be formed on each of the first active patterns AP. A pair of firstsource/drain regions SD1 may be formed at opposite sides of each of thesacrificial patterns PP.

Specifically, upper portions of the first active patterns AP1 may beetched using the hard mask patterns MA and the gate spacers GS as anetch mask to form first recess regions. The gate spacers GS on thesidewalls of each of the first active patterns AP1 may also be removedduring the etching of the upper portions of the first active patternsAP1. In addition, during the etching of the upper portions of the firstactive patterns AP1, the device isolation layer ST between the firstactive patterns AP1 may be recessed.

A selective epitaxial growth process may be performed using innersurfaces of the first recess regions of the first active patterns AP1 asa seed to form the first source/drain regions SD1. As the firstsource/drain regions SD1 are formed, the first channel region CH1 may beinterposed between a pair of first source/drain regions SD1. Theselective epitaxial growth process may include a chemical vapordeposition (CVD) process or a molecular beam epitaxy (MBE) process. Thefirst source/drain regions SD1 may include a semiconductor element(e.g., SiGe) having a lattice constant larger than that of asemiconductor element of the substrate 100. Each of the firstsource/drain regions SD1 may be formed of multiple semiconductor layers.

In some embodiments, impurities may be injected in-situ during theselective epitaxial growth process for forming the first source/drainregions SD1. In some embodiments, after the first source/drain regionsSD1 are formed, impurities may be injected into the first source/drainregions SD1. The first source/drain regions SD1 may be doped withimpurities of a first conductivity type (e.g., a p-type).

The second source/drain regions SD2 may be formed on each of the secondactive patterns AP2. A pair of second source/drain regions SD2 may beformed at opposite sides of each of the sacrificial patterns PP.

Specifically, upper portions of the second active patterns AP2 may beetched using the hard mask patterns MA and the gate spacers GS as anetch mask to form second recess regions. A selective epitaxial growthprocess may be performed using inner surfaces of the second recessregions of the second active patterns AP2 as a seed to form the secondsource/drain regions SD2. As the second source/drain regions SD2 areformed, the second channel region CH2 may be interposed between a pairof second source/drain regions SD2. The second source/drain regions SD2may include the same semiconductor element (e.g., Si) as the substrate100. The second source/drain regions SD2 may be doped with theimpurities of a second conductivity type (e.g., an n-type).

The first source/drain regions SD1 and the second source/drain regionsSD2 may be sequentially formed through different processes. In otherwords, the first source/drain regions SD1 and the second source/drainregions SD2 may not be formed at the same time.

Referring to FIGS. 9 and 10A to 10C, the first interlayer insulationlayer 110 may be formed to cover the first and second source/drainregions SD1 and SD2, the hard mask patterns MA, and the gate spacers GS.The first interlayer insulation layer 110 may include, e.g., siliconoxide.

The first interlayer insulation layer 110 may be planarized to exposeupper surfaces of the sacrificial patterns PP. The planarization of thefirst interlayer insulation layer 110 may be performed by an etch backprocess or a chemical mechanical polishing (CMP) process. The hard maskpatterns MA may be completely removed during the planarization process.Thus, an upper surface of the first interlayer insulation layer 110 maybe coplanar with the upper surfaces of the sacrificial patterns PP andupper surfaces of the gate spacers GS.

The sacrificial patterns PP may be replaced with the gate electrodes GE.Specifically, the exposed sacrificial patterns PP may be selectivelyremoved. As the sacrificial patterns PP are removed, empty spaces may beformed. The gate dielectric pattern GI, the gate electrode GE, and thegate capping pattern GP may be formed in each of the empty spaces. Thegate dielectric pattern GI may be conformally formed not to completelyfill each of the empty spaces. The gate dielectric pattern GI may beformed by an atomic layer deposition (ALD) process or a chemical vapordeposition (CVD) process. The gate dielectric pattern GI may include,e.g., a high-k dielectric material.

The gate electrode GE may be formed by forming a gate electrode layer tocompletely fill each of the empty spaces and then planarizing the gateelectrode layer. The gate electrode layer may include, e.g., metalnitride and/or metal.

Thereafter, an upper portion of the gate electrode GE may be recessed.The gate capping pattern GP may be formed on the recessed gate electrodeGE. The gate capping pattern GP may include at least one of SiON, SiCN,SiCON, and SiN.

Referring to FIGS. 11 and 12A to 12C, the second interlayer insulationlayer 120 may be formed on the first interlayer insulation layer 110.The second interlayer insulation layer 120 may include, e.g., a siliconoxide layer or a low-k oxide layer. The low-k oxide layer may includecarbon-doped silicon oxide, such as SiCOH. The second interlayerinsulation layer 120 may be formed by a chemical vapor deposition (CVD)process.

The contact hole CNH may be formed to pass through the second interlayerinsulation layer 120 and the first interlayer insulation layer 110 toexpose the first source/drain region SD1 and/or the second source/drainregion SD2. The contact spacer CSP may be formed to cover an innersidewall of the contact hole CNH. The contact spacer CSP may be formedby conformally forming a contact spacer layer to cover the innersidewall of the contact hole CNH and aniostropically etching the contactspacer layer. The contact spacer layer may include at least one of SiCN,SiCON, and SiN.

The first contact CT1 may be formed to fill a lower portion of thecontact hole CNH. The first contact CT1 may contact the first and secondsource/drain regions SD1 and SD2. The formation of the first contact CT1may include forming the first barrier pattern BM1 and the firstconductive pattern FM1. Specifically, a first barrier layer formed tofill the contact hole CNH, and then a first conductive layer may beformed on the first barrier layer. The first barrier layer and the firstconductive layer may be recessed to form the first barrier pattern BM1and the first conductive pattern FM1, respectively. The first barrierlayer may include metal nitride. The first conductive pattern mayinclude metal.

Referring to FIGS. 13 and 14A to 14C, the insulation layer MIL may beformed on the substrate 100. The insulation layer MIL may fill thecontact hole CNH. The insulation layer MIL may cover a top of thecontact hole CNH. The insulation layer MIL may include silicon oxide orsilicon nitride.

The insulation layer MIL may be patterned to form a sub-contact holesCNH in the contact hole CNH. The sub-contact hole sCNH may expose anupper surface of the first contact CT1. The sub-contact hole sCNH mayexpose the first portion P1 or the second portion P2 of the firstcontact CT1.

Referring again to FIGS. 1 and 2A to 2C, the second contact CT2 may beformed to fill the sub-contact hole sCNH. A planarization process may beperformed to expose an upper surface of the second interlayer insulationlayer 120. Accordingly, the contact structure AC including the firstcontact CT1 and the second contact CT2 may be formed.

The gate contacts GC may be formed to pass through the second interlayerinsulation layer 120 and the first interlayer insulation layer 110 to beelectrically connected to the gate electrodes GE, respectively. Theformation of the gate contacts GC may be similar to the formation of thefirst contact CT1. For example, the formation of each of the gatecontacts GC may include forming a contact hole to pass through thesecond interlayer insulation layer 120 and the first interlayerinsulation layer 110 to expose an upper surface of each of the gateelectrodes GE, forming the contact spacer CSP on an inner sidewall ofthe contact hole, and forming the second barrier pattern BM2 and thesecond conductive pattern FM2. In some embodiments, the gate contacts GCmay be formed along with the first contact CT1. In some embodiments, thegate contacts GC may be formed by a process separate from the contactstructures AC.

The third interlayer insulation layer 130 may be formed on the secondinterlayer insulation layer 120. The wiring lines M1 may be formed inthe third interlayer insulation layer 130 to be electrically connectedto the contact structures AC and the gate contact GC.

FIGS. 15 to 20 illustrate respectively a contact structure according toexample embodiments and are cross-sectional views of portion M of FIG.2A and of portion N of FIG. 2B. Detailed description of technicalfeatures overlapping with the semiconductor device described above withreference to FIGS. 1 and 2A through 2C will be omitted, and differenceswill be described in more detail

Referring to FIG. 15, an upper surface FMt of the first conductivepattern FM1 may be lower than an upper surface BMt of the first barrierpattern BM1, with respect to the upper surface of the substrate 100. Alower surface CTb of the second contact CT2 may be lower than the uppersurface BMt of the first barrier pattern BM1, with respect to the uppersurface of the substrate 100. In the contact structure AC according toexample embodiments, the first conductive pattern FM1 may be formed bybeing recessed further than the first barrier pattern BM1.

Referring to FIG. 16, the second contact CT2 may be offset from a centerline of the first contact CT1 extending through an axial center of thefirst contact CT1. The first barrier pattern BM1 may have a first uppersurface BMt1 at a first side thereof. The first barrier pattern BM1 mayhave a second upper surface BMt2 at a second side thereof opposite tothe first side thereof. The second upper surface BMt2 of the firstbarrier pattern BM1 may contact the second contact CT2. The secondsurface BMt2 of the first barrier pattern BM1 may be lower than thefirst surface BMt1 thereof, with respect to the upper surface of thesubstrate 100.

Referring to FIG. 17, the upper surface FMt of the first conductivepattern FM1 may be higher than the upper surface BMt of the firstbarrier pattern BM1, with respect to the upper surface of the substrate100. The lower surface CTb of the second contact CT2 may be higher thanthe upper surface BMt of the first barrier pattern BM1, with respect tothe upper surface of the substrate 100. An upper sidewall of the firstconductive pattern FM1 positioned higher than the upper surface BMt ofthe first barrier pattern BM1 may be covered by the insulation layerMIL. In the contact structure AC according to example embodiments, thefirst barrier pattern BM1 may be formed by being recessed further thanthe first conductive pattern FM1.

Referring to FIG. 18, the upper surface FMt of the first conductivepattern FM1 may be higher than the upper surface BMt of the firstbarrier pattern BM1, with respect to the upper surface of substrate 100.An upper portion UP of the first conductive pattern FM1 may cover theupper surface BMt of the first barrier pattern BM1. In other words, across-section of the first conductive pattern FM1 may have a T shape.The formation of the contact structure AC according to exampleembodiments may include forming the first barrier pattern BM1, formingthe first conductive layer on the first barrier pattern BM1, andrecessing the first conductive layer not to expose the first barrierpattern BM1 to form the first conductive pattern FM1.

Referring to FIG. 19, the second contact CT2 may include a third barrierpattern BM3 and a third conductive pattern FM3. The third barrierpattern BM3 may be interposed between the third conductive pattern FM3and the insulation layer MIL and between the third conductive patternFM3 and the first contact CT1. The third barrier pattern BM3 may coveropposite sidewalls and a lower surface of the third conductive patternFM3. The third barrier pattern BM3 may include metal nitride. The thirdconductive pattern FM3 may include metal.

Referring to FIG. 20. the first barrier pattern BM1 in the first contactCT1 may be omitted. For example, the first contact CT1 may be formed ofa single metal material. The second contact CT2 may include the thirdbarrier pattern BM3 and the third conductive pattern FM3.

While the present inventive concepts have been shown and described withreference to example embodiments thereof, it will be understood by thoseof ordinary skill in the art that various changes in form and detailsmay be made thereto without departing from the spirit and scope of thepresent inventive concepts as set forth by the following claims.

What is claimed is:
 1. A semiconductor device comprising: a substratehaving an active pattern therein; a gate electrode extending across theactive pattern; a source/drain region on the active pattern laterallyadjacent the gate electrode; a contact structure comprising: a firstcontact on the source/drain region; a second contact on the firstcontact; a spacer on sidewalls of the first and second contacts andhaving an upper surface coplanar with an upper surface of the secondcontact; a wiring line electrically connected to the contact structure;and a via disposed between the contact structure and the wiring line andconnecting the wiring line and the contact structure, wherein the firstand second contacts are conductors.
 2. The semiconductor deviceaccording to claim 1, wherein the contact structure further comprises aninsulation layer between the second contact and the spacer.
 3. Thesemiconductor device according to claim 1, wherein the gate electrodelongitudinally extends along a first direction and wherein a maximumwidth of the first contact along the first direction is greater than amaximum width of the second contact along the first direction.
 4. Thesemiconductor device according to claim 1, wherein the first contactcomprises a conductive pattern and a barrier pattern interposed betweenthe conductive pattern and the spacer and between the conductive patternand the source/drain region.
 5. The semiconductor device according toclaim 4, wherein an upper surface of the barrier pattern is at adifferent level than an upper surface of the conductive pattern.
 6. Thesemiconductor device according to claim 4, wherein an upper portion ofthe conductive pattern covers an upper surface of the barrier pattern.7. The semiconductor device according to claim 4, wherein the barrierpattern has a first upper surface and a second upper surface, whereinthe second contact contacts the second upper surface, and wherein thesecond upper surface of the barrier pattern is lower than the firstupper surface of the barrier pattern.
 8. The semiconductor deviceaccording to claim 1, further comprising a gate contact electricallyconnected to the gate electrode, wherein the gate electrodelongitudinally extends along a first direction, wherein the firstcontact comprises a first portion and a second portion adjacent to eachother along the first direction, wherein the first portion of the firstcontact is adjacent to the gate contact in a second direction transverseto the first direction and wherein the second contact is disposed on thesecond portion of the first contact.
 9. The semiconductor deviceaccording to claim 8, wherein an upper surface of the second contact iscoplanar with an upper surface of the gate contact, and wherein an uppersurface of the first contact is lower than a lower surface of the gatecontact.
 10. A semiconductor device comprising: a substrate having anactive pattern therein; a gate electrode extending across the activepattern; a source/drain region on the active pattern laterally adjacentthe gate electrode; a gate contact electrically connected to the gateelectrode; and a contact structure electrically connected to thesource/drain region and comprising: a first contact on the source/drainregions; a second contact on the first contact; and a spacer onsidewalls of the first and second contacts, wherein an upper surface ofthe second contact is coplanar with an upper surface of the gate contactand wherein an upper surface of the first contact is lower than a lowersurface of the gate contact, wherein the first contact comprises aconductive pattern and a barrier pattern interposed between theconductive pattern and the spacer and between the conductive pattern andthe source/drain region, and wherein the gate contact, the first contactand the second contact are conductors.
 11. The semiconductor deviceaccording to claim 10, wherein the contact structure further comprisesan insulation layer between the second contact and the spacer.
 12. Thesemiconductor device according to claim 10, wherein the gate electrodelongitudinally extends along a first direction, wherein the firstcontact includes a first portion and a second portion adjacent to eachother in the first direction, wherein the first portion of the firstcontact is adjacent to the gate contact in a second direction transverseto the first direction and wherein the second contact is disposed on thesecond portion of the first contact.
 13. The semiconductor deviceaccording to claim 10, wherein the gate electrode longitudinally extendsalong a first direction and wherein a maximum width of the first contactalong the first direction is greater than a maximum width of the secondcontact along the first direction.
 14. A semiconductor devicecomprising: a substrate having an active pattern therein; a gateelectrode longitudinally extending across the active pattern along afirst direction; a source/drain region on the active pattern laterallyadjacent the gate electrode; and a contact structure comprising: a firstcontact on the source/drain region; a second contact on the firstcontact and having a maximum width less than a maximum width of thefirst contact along the first direction; and an insulation layer on asidewall of the first contact, wherein the first and second contacts areconductors, and wherein the contact structure further comprises a spaceron sidewalls of the first and second contacts and wherein the insulationlayer is interposed between the second contact and the spacer.
 15. Thesemiconductor device according to claim 14, wherein the insulation layercovers a portion of an upper surface of the first contact and a sidewallof the second contact.
 16. The semiconductor device according to claim14, further comprising a gate contact electrically connected to the gateelectrode, wherein the first contact comprises a first portion and asecond portion adjacent to each other in the first direction, whereinthe first portion of the first contact is adjacent to the gate contactin a second direction transverse to the first direction and wherein thesecond contact is disposed on the second portion of the first contact.17. The semiconductor device according to claim 16, wherein an uppersurface of the second contact is coplanar with an upper surface of thegate contact and wherein an upper surface of the first contact is lowerthan a lower surface of the gate contact.